Modeling of micro-diaphragm for optical pressure sensor for human artery pulse wave detection / Khairunnisa Hasikin
This thesis presents the development of a micro-diaphragm for an optical pulse pressure sensor using Micro-electro-mechanical Systems (MEMS) technology. Modelling of the micro-diaphragm was conducted and the comparison of its performance was simulated for silicon nitride and polyirnide materials. In...
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| Format: | Thesis |
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2010
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| Online Access: | http://studentsrepo.um.edu.my/9781/ http://studentsrepo.um.edu.my/9781/1/Khairunnisa_Hasikin_%2D_Academic_exercise.pdf |