Trap-assisted tunneling mechanism of Zirconium Oxynitride (ZrON) thin film on Silicon Carbide / Nicklaane Krishnamoorthy

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Trap-assisted tunneling mechanism of Zirconium Oxynitride (ZrON) thin film on Silicon Carbide / Nicklaane Krishnamoorthy

This research is a study on the possibilities of trap-assisted tunneling conduction mechanism in Zirconium Oxynitride (ZrON) after Zirconium (Zr) with thickness 5nm was sputtered on Silicon Carbide (SiC) substrate which then underwent simultaneous nitridation and oxidation in Nitrous Oxide (N2O) for...

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Bibliographic Details
Main Author:	Nicklaane, Krishnamoorthy
Format:	Thesis
Published:	2020
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://studentsrepo.um.edu.my/12126/ http://studentsrepo.um.edu.my/12126/1/Nicklaane_Krishnamoorthy.jpg http://studentsrepo.um.edu.my/12126/8/nick.pdf

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