Design and simulation of a high temperature MEMS microhotplate for application in trace gas detection

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Design and simulation of a high temperature MEMS microhotplate for application in trace gas detection

In this paper, we present the simulation results of a high temperature MEMS micro-hotplate. The electro-thermomechanical behaviors of micro- hotplates (MHP) have been simulated using CoventorWare. In the simulation, the effects of various thicknesses of the silicon nitride (Si<sub>3</sub>...

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Bibliographic Details
Main Authors:	N.M., Saad, A.Y., Ahmed, J.O., Dennis, W.A., Talah
Format:	Conference or Workshop Item
Language:	English
Published:	2008
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://scholars.utp.edu.my/id/eprint/376/ http://scholars.utp.edu.my/id/eprint/376/1/paper.pdf

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