Design and simulation of a high temperature MEMS microhotplate for application in trace gas detection
In this paper, we present the simulation results of a high temperature MEMS micro-hotplate. The electro-thermomechanical behaviors of micro- hotplates (MHP) have been simulated using CoventorWare. In the simulation, the effects of various thicknesses of the silicon nitride (Si<sub>3</sub>...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://scholars.utp.edu.my/id/eprint/376/ http://scholars.utp.edu.my/id/eprint/376/1/paper.pdf |