Design, Simulation and Modeling of a Micromachined High Temperature Microhotplate for Application in Trace Gas Detection

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Design, Simulation and Modeling of a Micromachined High Temperature Microhotplate for Application in Trace Gas Detection

Modeling and simulation of a micromachined microhotplate (MHP) designed to achieve low power dissipation and uniform temperature distribution on the sensing area at operating temperatures of up to 700°C is presented in this paper. At the operating temperature of 700°C, it is demonstrated that as the...

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Bibliographic Details
Main Authors:	Dennis , John Ojur, Ahmed, Abdelaziz Yousif, Mohamad, Naufal Mohamad
Format:	Citation Index Journal
Language:	English
Published:	publisher@ijens.org 2010
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://scholars.utp.edu.my/id/eprint/1151/ http://scholars.utp.edu.my/id/eprint/1151/1/IJENS.pdf

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