Design, Simulation and Modeling of a Micromachined High Temperature Microhotplate for Application in Trace Gas Detection
Modeling and simulation of a micromachined microhotplate (MHP) designed to achieve low power dissipation and uniform temperature distribution on the sensing area at operating temperatures of up to 700°C is presented in this paper. At the operating temperature of 700°C, it is demonstrated that as the...
| Main Authors: | , , |
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| Format: | Citation Index Journal |
| Language: | English |
| Published: |
publisher@ijens.org
2010
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| Subjects: | |
| Online Access: | http://scholars.utp.edu.my/id/eprint/1151/ http://scholars.utp.edu.my/id/eprint/1151/1/IJENS.pdf |