Improving coherence scanning interferometry signal modelling and topography measurement for complex surfaces

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Improving coherence scanning interferometry signal modelling and topography measurement for complex surfaces

This thesis presents work on advanced optical surface metrology methods that enable extending the range of surface slopes that can be reliably measured by optical surface topography measurement instruments, and on investigating the reliability of the current capability. Optical instruments can only...

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Bibliographic Details
Main Author:	Thomas, Matthew
Format:	Thesis (University of Nottingham only)
Language:	English
Published:	2022
Subjects:	Surfaces; Optical measurements; Interferometry; Boundary element methods
Online Access:	https://eprints.nottingham.ac.uk/71686/

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