Improving coherence scanning interferometry signal modelling and topography measurement for complex surfaces
This thesis presents work on advanced optical surface metrology methods that enable extending the range of surface slopes that can be reliably measured by optical surface topography measurement instruments, and on investigating the reliability of the current capability. Optical instruments can only...
| Main Author: | |
|---|---|
| Format: | Thesis (University of Nottingham only) |
| Language: | English |
| Published: |
2022
|
| Subjects: | |
| Online Access: | https://eprints.nottingham.ac.uk/71686/ |