Experimental study on seismic vibration control of stockers in wafer and LCD panel fabs

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Experimental study on seismic vibration control of stockers in wafer and LCD panel fabs

Automated stocker system is widely used in semiconductor and liquid crystal display (LCD) industries for handling and storage of valuable wafers or glass panels. Massive front opening unified pods (foups) containing wafers, or cassettes storing glass panels, are placed in shelf stockers during manuf...

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Bibliographic Details
Main Authors:	Chen, Yung-Tsang, Lee, Chien-Liang, Wang, Miao-Chi, Wang, Yen-Po
Format:	Article
Language:	English
Published:	2021
Subjects:	Wafer fab LCD panel fab Stockers Seismic energy dissipation Viscous fluid dampers
Online Access:	https://eprints.nottingham.ac.uk/64815/

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