Experimental study on seismic vibration control of stockers in wafer and LCD panel fabs
Automated stocker system is widely used in semiconductor and liquid crystal display (LCD) industries for handling and storage of valuable wafers or glass panels. Massive front opening unified pods (foups) containing wafers, or cassettes storing glass panels, are placed in shelf stockers during manuf...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2021
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| Subjects: | |
| Online Access: | https://eprints.nottingham.ac.uk/64815/ |