Experimental study on seismic vibration control of stockers in wafer and LCD panel fabs
Automated stocker system is widely used in semiconductor and liquid crystal display (LCD) industries for handling and storage of valuable wafers or glass panels. Massive front opening unified pods (foups) containing wafers, or cassettes storing glass panels, are placed in shelf stockers during manuf...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2021
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| Online Access: | https://eprints.nottingham.ac.uk/64815/ |
| _version_ | 1848800170480762880 |
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| author | Chen, Yung-Tsang Lee, Chien-Liang Wang, Miao-Chi Wang, Yen-Po |
| author_facet | Chen, Yung-Tsang Lee, Chien-Liang Wang, Miao-Chi Wang, Yen-Po |
| author_sort | Chen, Yung-Tsang |
| building | Nottingham Research Data Repository |
| collection | Online Access |
| description | Automated stocker system is widely used in semiconductor and liquid crystal display (LCD) industries for handling and storage of valuable wafers or glass panels. Massive front opening unified pods (foups) containing wafers, or cassettes storing glass panels, are placed in shelf stockers during manufacturing. Although several preventative measures have been taken, during the past earthquakes, substantial financial loss from the industries were reported, and one of the main causes was attributed to collision of the foups or cassettes and shake off from the shelfs. This paper proposes a methodology of incorporating viscous fluid dampers into the stokers to mitigate their seismic response. Unlike conventionally been done in buildings where dampers are placed between adjacent stories, it is proposed to install dampers in between the ceiling and top of the stocker. Such configuration utilizes the large velocity at the stocker top under vibration, resulting in smaller damper size, and enables a leverage mechanism that requires smaller damper force to resist the stocker’s vibration. Both shake table tests and simulation of a full-scale stocker under realistic earthquakes have been conducted. Results indicate that both displacement and acceleration responses of the stocker can be significantly reduced, and dynamic response of the stocker under seismic excitations can be well predicted. |
| first_indexed | 2025-11-14T20:47:18Z |
| format | Article |
| id | nottingham-64815 |
| institution | University of Nottingham Malaysia Campus |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T20:47:18Z |
| publishDate | 2021 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | nottingham-648152021-03-24T01:53:05Z https://eprints.nottingham.ac.uk/64815/ Experimental study on seismic vibration control of stockers in wafer and LCD panel fabs Chen, Yung-Tsang Lee, Chien-Liang Wang, Miao-Chi Wang, Yen-Po Automated stocker system is widely used in semiconductor and liquid crystal display (LCD) industries for handling and storage of valuable wafers or glass panels. Massive front opening unified pods (foups) containing wafers, or cassettes storing glass panels, are placed in shelf stockers during manufacturing. Although several preventative measures have been taken, during the past earthquakes, substantial financial loss from the industries were reported, and one of the main causes was attributed to collision of the foups or cassettes and shake off from the shelfs. This paper proposes a methodology of incorporating viscous fluid dampers into the stokers to mitigate their seismic response. Unlike conventionally been done in buildings where dampers are placed between adjacent stories, it is proposed to install dampers in between the ceiling and top of the stocker. Such configuration utilizes the large velocity at the stocker top under vibration, resulting in smaller damper size, and enables a leverage mechanism that requires smaller damper force to resist the stocker’s vibration. Both shake table tests and simulation of a full-scale stocker under realistic earthquakes have been conducted. Results indicate that both displacement and acceleration responses of the stocker can be significantly reduced, and dynamic response of the stocker under seismic excitations can be well predicted. 2021-06-01 Article PeerReviewed application/pdf en cc_by https://eprints.nottingham.ac.uk/64815/1/Experimental%20Study%20on%20Seismic%20Vibration%20Control%20of%20Stockers%20in%20Wafer%20and%20LCD%20Panel%20Fabs.pdf Chen, Yung-Tsang, Lee, Chien-Liang, Wang, Miao-Chi and Wang, Yen-Po (2021) Experimental study on seismic vibration control of stockers in wafer and LCD panel fabs. Structures, 31 . pp. 1185-1198. ISSN 2352-0124 Wafer fab LCD panel fab Stockers Seismic energy dissipation Viscous fluid dampers http://dx.doi.org/10.1016/j.istruc.2021.02.009 doi:10.1016/j.istruc.2021.02.009 doi:10.1016/j.istruc.2021.02.009 |
| spellingShingle | Wafer fab LCD panel fab Stockers Seismic energy dissipation Viscous fluid dampers Chen, Yung-Tsang Lee, Chien-Liang Wang, Miao-Chi Wang, Yen-Po Experimental study on seismic vibration control of stockers in wafer and LCD panel fabs |
| title | Experimental study on seismic vibration control of stockers in wafer and LCD panel fabs |
| title_full | Experimental study on seismic vibration control of stockers in wafer and LCD panel fabs |
| title_fullStr | Experimental study on seismic vibration control of stockers in wafer and LCD panel fabs |
| title_full_unstemmed | Experimental study on seismic vibration control of stockers in wafer and LCD panel fabs |
| title_short | Experimental study on seismic vibration control of stockers in wafer and LCD panel fabs |
| title_sort | experimental study on seismic vibration control of stockers in wafer and lcd panel fabs |
| topic | Wafer fab LCD panel fab Stockers Seismic energy dissipation Viscous fluid dampers |
| url | https://eprints.nottingham.ac.uk/64815/ https://eprints.nottingham.ac.uk/64815/ https://eprints.nottingham.ac.uk/64815/ |