Numerical modelling of microwave plasma-assisted chemical vapour deposition reactors for diamond synthesis
This thesis studies the numerical modelling of microwave plasma-assisted chemical vapour deposition (MPA-CVD) reactors for synthetic diamond synthesis. Specifically we model the formation of a plasma within these reactors, which is responsible for enabling the deposition of carbon onto a substrate f...
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| Format: | Thesis (University of Nottingham only) |
| Language: | English |
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2020
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| Online Access: | https://eprints.nottingham.ac.uk/60919/ |