Mechanical characterisation of adhesive bonds in MEMS inertial sensors
Micro-Electro-Mechanical Systems (MEMS) inertial sensors are used to measure acceleration and rate of angular rotation based on the deformation of a small sensitive structure, and are widely used from low-cost commercial to high-performance space and defence applications. Packaging processes can ind...
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| Format: | Thesis (University of Nottingham only) |
| Language: | English |
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2018
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| Online Access: | https://eprints.nottingham.ac.uk/55292/ |