Verification of a rigorous 2D model of rough surface scattering

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Verification of a rigorous 2D model of rough surface scattering

A rigorous two-dimensional (2D) model of electromagnetic surface scatter has been developed, based on a boundary element method (BEM) established by Simonsen [1]. Simulated far-field scatter is compared to that measured from a laser scatterometer for a sinusoidal grating, with a mean difference of 3...

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Bibliographic Details
Main Authors:	Thomas, M., Leach, R.K., Nikolaev, N., Widjanarko, T., Senin, N., Aryan, H., Coupland, J.M.
Format:	Conference or Workshop Item
Published:	2018
Online Access:	https://eprints.nottingham.ac.uk/53060/

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