Verification of a rigorous 2D model of rough surface scattering
A rigorous two-dimensional (2D) model of electromagnetic surface scatter has been developed, based on a boundary element method (BEM) established by Simonsen [1]. Simulated far-field scatter is compared to that measured from a laser scatterometer for a sinusoidal grating, with a mean difference of 3...
| Main Authors: | , , , , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2018
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| Online Access: | https://eprints.nottingham.ac.uk/53060/ |