Verification of a rigorous 2D model of rough surface scattering
A rigorous two-dimensional (2D) model of electromagnetic surface scatter has been developed, based on a boundary element method (BEM) established by Simonsen [1]. Simulated far-field scatter is compared to that measured from a laser scatterometer for a sinusoidal grating, with a mean difference of 3...
| Main Authors: | , , , , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2018
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| Online Access: | https://eprints.nottingham.ac.uk/53060/ |
| _version_ | 1848798868599209984 |
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| author | Thomas, M. Leach, R.K. Nikolaev, N. Widjanarko, T. Senin, N. Aryan, H. Coupland, J.M. |
| author_facet | Thomas, M. Leach, R.K. Nikolaev, N. Widjanarko, T. Senin, N. Aryan, H. Coupland, J.M. |
| author_sort | Thomas, M. |
| building | Nottingham Research Data Repository |
| collection | Online Access |
| description | A rigorous two-dimensional (2D) model of electromagnetic surface scatter has been developed, based on a boundary element method (BEM) established by Simonsen [1]. Simulated far-field scatter is compared to that measured from a laser scatterometer for a sinusoidal grating, with a mean difference of 3% of the peak intensity. |
| first_indexed | 2025-11-14T20:26:37Z |
| format | Conference or Workshop Item |
| id | nottingham-53060 |
| institution | University of Nottingham Malaysia Campus |
| institution_category | Local University |
| last_indexed | 2025-11-14T20:26:37Z |
| publishDate | 2018 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | nottingham-530602020-05-04T19:49:39Z https://eprints.nottingham.ac.uk/53060/ Verification of a rigorous 2D model of rough surface scattering Thomas, M. Leach, R.K. Nikolaev, N. Widjanarko, T. Senin, N. Aryan, H. Coupland, J.M. A rigorous two-dimensional (2D) model of electromagnetic surface scatter has been developed, based on a boundary element method (BEM) established by Simonsen [1]. Simulated far-field scatter is compared to that measured from a laser scatterometer for a sinusoidal grating, with a mean difference of 3% of the peak intensity. 2018-10-12 Conference or Workshop Item PeerReviewed Thomas, M., Leach, R.K., Nikolaev, N., Widjanarko, T., Senin, N., Aryan, H. and Coupland, J.M. (2018) Verification of a rigorous 2D model of rough surface scattering. In: European Optical Society Biennial Meeting (EOSAM) 2018, 8-12 October 2018, Delft, Netherlands. |
| spellingShingle | Thomas, M. Leach, R.K. Nikolaev, N. Widjanarko, T. Senin, N. Aryan, H. Coupland, J.M. Verification of a rigorous 2D model of rough surface scattering |
| title | Verification of a rigorous 2D model of rough surface scattering |
| title_full | Verification of a rigorous 2D model of rough surface scattering |
| title_fullStr | Verification of a rigorous 2D model of rough surface scattering |
| title_full_unstemmed | Verification of a rigorous 2D model of rough surface scattering |
| title_short | Verification of a rigorous 2D model of rough surface scattering |
| title_sort | verification of a rigorous 2d model of rough surface scattering |
| url | https://eprints.nottingham.ac.uk/53060/ |