Verification of a rigorous 2D model of rough surface scattering
A rigorous two-dimensional (2D) model of electromagnetic surface scatter has been developed, based on a boundary element method (BEM) established by Simonsen [1]. Simulated far-field scatter is compared to that measured from a laser scatterometer for a sinusoidal grating, with a mean difference of 3...
Full description
Bibliographic Details
| Main Authors: |
Thomas, M.,
Leach, R.K.,
Nikolaev, N.,
Widjanarko, T.,
Senin, N.,
Aryan, H.,
Coupland, J.M. |
|---|
| Format: | Conference or Workshop Item
|
|---|
| Published: |
2018
|
|---|
| Online Access: | https://eprints.nottingham.ac.uk/53060/
|
|---|