Information-rich surface metrology

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Information-rich surface metrology

Information-rich metrology refers to the incorporation of any type of available information in the data acquisition and processing pipeline of a measurement process, in order to improve the efficiency and quality of the measurement. In this work, the information-rich metrology paradigm is explored a...

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Bibliographic Details
Main Authors:	Senin, Nicola, Leach, Richard K.
Format:	Article
Published:	Elsevier 2018
Subjects:	Surface metrology; areal topography characterisation; information rich metrology
Online Access:	https://eprints.nottingham.ac.uk/51923/

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