Information-rich surface metrology
Information-rich metrology refers to the incorporation of any type of available information in the data acquisition and processing pipeline of a measurement process, in order to improve the efficiency and quality of the measurement. In this work, the information-rich metrology paradigm is explored a...
| Main Authors: | , |
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| Format: | Article |
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Elsevier
2018
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| Online Access: | https://eprints.nottingham.ac.uk/51923/ |