Stress-dependent local oxidation of silicon

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Stress-dependent local oxidation of silicon

The two-dimensional isolation oxidation of silicon is considered for stress-dependent reaction and diffusion coefficients. The influence of such parameters is investigated numerically and asymptotically in the bird's beak problem and for curved geometries arising in the oxidation of cylindrical...

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Bibliographic Details
Main Authors:	Evans, J.D., King, J.R.
Format:	Article
Published:	Society for Industrial and Applied Mathematics 2017
Online Access:	https://eprints.nottingham.ac.uk/50646/

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