Stress-dependent local oxidation of silicon
The two-dimensional isolation oxidation of silicon is considered for stress-dependent reaction and diffusion coefficients. The influence of such parameters is investigated numerically and asymptotically in the bird's beak problem and for curved geometries arising in the oxidation of cylindrical...
| Main Authors: | , |
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| Format: | Article |
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Society for Industrial and Applied Mathematics
2017
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| Online Access: | https://eprints.nottingham.ac.uk/50646/ |