Lateral error compensation for focus variation microscopy

Focus variation microscopy measures both the areal form and areal surface texture of components. Improvements to the accuracy and precision of focus variation microscopes usually requires measurements with multiple image-fields to compensate lateral stage errors. This paper proposes a methodology fo...

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Main Authors: Pérez, Pablo, Syam, Wahyudin P., Albajez, José Antonio, Santolaria, Jorge, Leach, Richard
Format: Conference or Workshop Item
Published: 2018
Online Access:https://eprints.nottingham.ac.uk/50625/
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author Pérez, Pablo
Syam, Wahyudin P.
Albajez, José Antonio
Santolaria, Jorge
Leach, Richard
author_facet Pérez, Pablo
Syam, Wahyudin P.
Albajez, José Antonio
Santolaria, Jorge
Leach, Richard
author_sort Pérez, Pablo
building Nottingham Research Data Repository
collection Online Access
description Focus variation microscopy measures both the areal form and areal surface texture of components. Improvements to the accuracy and precision of focus variation microscopes usually requires measurements with multiple image-fields to compensate lateral stage errors. This paper proposes a methodology for compensation of lateral stage error of a focus variation microscope using an uncalibrated artefact.
first_indexed 2025-11-14T20:17:34Z
format Conference or Workshop Item
id nottingham-50625
institution University of Nottingham Malaysia Campus
institution_category Local University
last_indexed 2025-11-14T20:17:34Z
publishDate 2018
recordtype eprints
repository_type Digital Repository
spelling nottingham-506252020-05-04T19:39:42Z https://eprints.nottingham.ac.uk/50625/ Lateral error compensation for focus variation microscopy Pérez, Pablo Syam, Wahyudin P. Albajez, José Antonio Santolaria, Jorge Leach, Richard Focus variation microscopy measures both the areal form and areal surface texture of components. Improvements to the accuracy and precision of focus variation microscopes usually requires measurements with multiple image-fields to compensate lateral stage errors. This paper proposes a methodology for compensation of lateral stage error of a focus variation microscope using an uncalibrated artefact. 2018-06-04 Conference or Workshop Item PeerReviewed Pérez, Pablo, Syam, Wahyudin P., Albajez, José Antonio, Santolaria, Jorge and Leach, Richard (2018) Lateral error compensation for focus variation microscopy. In: 18th EUSPEN International Conference & Exhibition, 4–8 June 2018, Venice, Italy.
spellingShingle Pérez, Pablo
Syam, Wahyudin P.
Albajez, José Antonio
Santolaria, Jorge
Leach, Richard
Lateral error compensation for focus variation microscopy
title Lateral error compensation for focus variation microscopy
title_full Lateral error compensation for focus variation microscopy
title_fullStr Lateral error compensation for focus variation microscopy
title_full_unstemmed Lateral error compensation for focus variation microscopy
title_short Lateral error compensation for focus variation microscopy
title_sort lateral error compensation for focus variation microscopy
url https://eprints.nottingham.ac.uk/50625/