Lateral error compensation for focus variation microscopy
Focus variation microscopy measures both the areal form and areal surface texture of components. Improvements to the accuracy and precision of focus variation microscopes usually requires measurements with multiple image-fields to compensate lateral stage errors. This paper proposes a methodology fo...
| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2018
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| Online Access: | https://eprints.nottingham.ac.uk/50625/ |
| _version_ | 1848798300105342976 |
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| author | Pérez, Pablo Syam, Wahyudin P. Albajez, José Antonio Santolaria, Jorge Leach, Richard |
| author_facet | Pérez, Pablo Syam, Wahyudin P. Albajez, José Antonio Santolaria, Jorge Leach, Richard |
| author_sort | Pérez, Pablo |
| building | Nottingham Research Data Repository |
| collection | Online Access |
| description | Focus variation microscopy measures both the areal form and areal surface texture of components. Improvements to the accuracy and precision of focus variation microscopes usually requires measurements with multiple image-fields to compensate lateral stage errors. This paper proposes a methodology for compensation of lateral stage error of a focus variation microscope using an uncalibrated artefact. |
| first_indexed | 2025-11-14T20:17:34Z |
| format | Conference or Workshop Item |
| id | nottingham-50625 |
| institution | University of Nottingham Malaysia Campus |
| institution_category | Local University |
| last_indexed | 2025-11-14T20:17:34Z |
| publishDate | 2018 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | nottingham-506252020-05-04T19:39:42Z https://eprints.nottingham.ac.uk/50625/ Lateral error compensation for focus variation microscopy Pérez, Pablo Syam, Wahyudin P. Albajez, José Antonio Santolaria, Jorge Leach, Richard Focus variation microscopy measures both the areal form and areal surface texture of components. Improvements to the accuracy and precision of focus variation microscopes usually requires measurements with multiple image-fields to compensate lateral stage errors. This paper proposes a methodology for compensation of lateral stage error of a focus variation microscope using an uncalibrated artefact. 2018-06-04 Conference or Workshop Item PeerReviewed Pérez, Pablo, Syam, Wahyudin P., Albajez, José Antonio, Santolaria, Jorge and Leach, Richard (2018) Lateral error compensation for focus variation microscopy. In: 18th EUSPEN International Conference & Exhibition, 4–8 June 2018, Venice, Italy. |
| spellingShingle | Pérez, Pablo Syam, Wahyudin P. Albajez, José Antonio Santolaria, Jorge Leach, Richard Lateral error compensation for focus variation microscopy |
| title | Lateral error compensation for focus variation microscopy |
| title_full | Lateral error compensation for focus variation microscopy |
| title_fullStr | Lateral error compensation for focus variation microscopy |
| title_full_unstemmed | Lateral error compensation for focus variation microscopy |
| title_short | Lateral error compensation for focus variation microscopy |
| title_sort | lateral error compensation for focus variation microscopy |
| url | https://eprints.nottingham.ac.uk/50625/ |