Lateral error compensation for focus variation microscopy
Focus variation microscopy measures both the areal form and areal surface texture of components. Improvements to the accuracy and precision of focus variation microscopes usually requires measurements with multiple image-fields to compensate lateral stage errors. This paper proposes a methodology fo...
| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2018
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| Online Access: | https://eprints.nottingham.ac.uk/50625/ |