Noise evaluation of a point autofocus surface topography measuring instrument

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Noise evaluation of a point autofocus surface topography measuring instrument

In this work, the measurement noise of a point autofocus surface topography measuring instrument is evaluated, as the first step towards establishing a route to traceability for this type of instrument. The evaluation is based on the determination of the metrological characteristics for noise as out...

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Bibliographic Details
Main Authors:	Maculotti, Giacomo, Feng, Xiaobing, Galetto, Maurizio, Leach, Richard K.
Format:	Article
Published:	IOP Publishing 2018
Online Access:	https://eprints.nottingham.ac.uk/50365/

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