Noise evaluation of a point autofocus surface topography measuring instrument
In this work, the measurement noise of a point autofocus surface topography measuring instrument is evaluated, as the first step towards establishing a route to traceability for this type of instrument. The evaluation is based on the determination of the metrological characteristics for noise as out...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Published: |
IOP Publishing
2018
|
| Online Access: | https://eprints.nottingham.ac.uk/50365/ |