Noise evaluation of a point autofocus surface topography measuring instrument
In this work, the measurement noise of a point autofocus surface topography measuring instrument is evaluated, as the first step towards establishing a route to traceability for this type of instrument. The evaluation is based on the determination of the metrological characteristics for noise as out...
| Main Authors: | , , , |
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| Format: | Article |
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IOP Publishing
2018
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| Online Access: | https://eprints.nottingham.ac.uk/50365/ |
| _version_ | 1848798232833949696 |
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| author | Maculotti, Giacomo Feng, Xiaobing Galetto, Maurizio Leach, Richard K. |
| author_facet | Maculotti, Giacomo Feng, Xiaobing Galetto, Maurizio Leach, Richard K. |
| author_sort | Maculotti, Giacomo |
| building | Nottingham Research Data Repository |
| collection | Online Access |
| description | In this work, the measurement noise of a point autofocus surface topography measuring instrument is evaluated, as the first step towards establishing a route to traceability for this type of instrument. The evaluation is based on the determination of the metrological characteristics for noise as outlined in draft ISO specification standards by using a calibrated optical flat. The static noise and repeatability of the autofocus sensor are evaluated. The influence of environmental disturbances on the measured surface topography and the built-in software to compensate for such influences are also investigated. The instrument was found to have a measurement noise of approximately 2 nm or, when expressed with the measurement bandwidth, 0.4 nm/√Hz for a single-point measurement. |
| first_indexed | 2025-11-14T20:16:30Z |
| format | Article |
| id | nottingham-50365 |
| institution | University of Nottingham Malaysia Campus |
| institution_category | Local University |
| last_indexed | 2025-11-14T20:16:30Z |
| publishDate | 2018 |
| publisher | IOP Publishing |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | nottingham-503652020-05-04T19:33:40Z https://eprints.nottingham.ac.uk/50365/ Noise evaluation of a point autofocus surface topography measuring instrument Maculotti, Giacomo Feng, Xiaobing Galetto, Maurizio Leach, Richard K. In this work, the measurement noise of a point autofocus surface topography measuring instrument is evaluated, as the first step towards establishing a route to traceability for this type of instrument. The evaluation is based on the determination of the metrological characteristics for noise as outlined in draft ISO specification standards by using a calibrated optical flat. The static noise and repeatability of the autofocus sensor are evaluated. The influence of environmental disturbances on the measured surface topography and the built-in software to compensate for such influences are also investigated. The instrument was found to have a measurement noise of approximately 2 nm or, when expressed with the measurement bandwidth, 0.4 nm/√Hz for a single-point measurement. IOP Publishing 2018-04-26 Article PeerReviewed Maculotti, Giacomo, Feng, Xiaobing, Galetto, Maurizio and Leach, Richard K. (2018) Noise evaluation of a point autofocus surface topography measuring instrument. Measurement Science and Technology, 29 (6). 065008. ISSN 1361-6501 http://iopscience.iop.org/article/10.1088/1361-6501/aab528/meta doi:10.1088/1361-6501/aab528 doi:10.1088/1361-6501/aab528 |
| spellingShingle | Maculotti, Giacomo Feng, Xiaobing Galetto, Maurizio Leach, Richard K. Noise evaluation of a point autofocus surface topography measuring instrument |
| title | Noise evaluation of a point autofocus surface topography measuring instrument |
| title_full | Noise evaluation of a point autofocus surface topography measuring instrument |
| title_fullStr | Noise evaluation of a point autofocus surface topography measuring instrument |
| title_full_unstemmed | Noise evaluation of a point autofocus surface topography measuring instrument |
| title_short | Noise evaluation of a point autofocus surface topography measuring instrument |
| title_sort | noise evaluation of a point autofocus surface topography measuring instrument |
| url | https://eprints.nottingham.ac.uk/50365/ https://eprints.nottingham.ac.uk/50365/ https://eprints.nottingham.ac.uk/50365/ |