Noise evaluation of a point autofocus surface topography measuring instrument
In this work, the measurement noise of a point autofocus surface topography measuring instrument is evaluated, as the first step towards establishing a route to traceability for this type of instrument. The evaluation is based on the determination of the metrological characteristics for noise as out...
| Main Authors: | , , , |
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| Format: | Article |
| Published: |
IOP Publishing
2018
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| Online Access: | https://eprints.nottingham.ac.uk/50365/ |
| Summary: | In this work, the measurement noise of a point autofocus surface topography measuring instrument is evaluated, as the first step towards establishing a route to traceability for this type of instrument. The evaluation is based on the determination of the metrological characteristics for noise as outlined in draft ISO specification standards by using a calibrated optical flat. The static noise and repeatability of the autofocus sensor are evaluated. The influence of environmental disturbances on the measured surface topography and the built-in software to compensate for such influences are also investigated. The instrument was found to have a measurement noise of approximately 2 nm or, when expressed with the measurement bandwidth, 0.4 nm/√Hz for a single-point measurement. |
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