Effects of defocus on the transfer function of coherence scanning interferometry

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Effects of defocus on the transfer function of coherence scanning interferometry

Coherence scanning interferometry (CSI) offers three dimensional (3D) measurement of surface topography with high precision and accuracy. Defocus within the interferometric objective lens, however, is commonly present in CSI measurements, and reduces both the resolving power of the imaging system an...

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Bibliographic Details
Main Authors:	Su, Rong, Thomas, Matthew, Leach, Richard, Coupland, Jeremy
Format:	Article
Published:	Optical Society of America 2017
Online Access:	https://eprints.nottingham.ac.uk/48237/

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