Effects of defocus on the transfer function of coherence scanning interferometry
Coherence scanning interferometry (CSI) offers three dimensional (3D) measurement of surface topography with high precision and accuracy. Defocus within the interferometric objective lens, however, is commonly present in CSI measurements, and reduces both the resolving power of the imaging system an...
| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Optical Society of America
2017
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| Online Access: | https://eprints.nottingham.ac.uk/48237/ |