Effects of defocus on the transfer function of coherence scanning interferometry
Coherence scanning interferometry (CSI) offers three dimensional (3D) measurement of surface topography with high precision and accuracy. Defocus within the interferometric objective lens, however, is commonly present in CSI measurements, and reduces both the resolving power of the imaging system an...
| Main Authors: | , , , |
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| Format: | Article |
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Optical Society of America
2017
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| Online Access: | https://eprints.nottingham.ac.uk/48237/ |
| _version_ | 1848797721654198272 |
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| author | Su, Rong Thomas, Matthew Leach, Richard Coupland, Jeremy |
| author_facet | Su, Rong Thomas, Matthew Leach, Richard Coupland, Jeremy |
| author_sort | Su, Rong |
| building | Nottingham Research Data Repository |
| collection | Online Access |
| description | Coherence scanning interferometry (CSI) offers three dimensional (3D) measurement of surface topography with high precision and accuracy. Defocus within the interferometric objective lens, however, is commonly present in CSI measurements, and reduces both the resolving power of the imaging system and the ability to measure tilted surfaces. This paper extends the linear theory of CSI to consider the effects of defocus on the 3D transfer function and the point spread function in an otherwise ideal CSI instrument. The results are compared with measurements of these functions in a real instrument. This work provides further evidence for the validity of the linear systems theory of CSI. |
| first_indexed | 2025-11-14T20:08:23Z |
| format | Article |
| id | nottingham-48237 |
| institution | University of Nottingham Malaysia Campus |
| institution_category | Local University |
| last_indexed | 2025-11-14T20:08:23Z |
| publishDate | 2017 |
| publisher | Optical Society of America |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | nottingham-482372020-05-04T19:23:54Z https://eprints.nottingham.ac.uk/48237/ Effects of defocus on the transfer function of coherence scanning interferometry Su, Rong Thomas, Matthew Leach, Richard Coupland, Jeremy Coherence scanning interferometry (CSI) offers three dimensional (3D) measurement of surface topography with high precision and accuracy. Defocus within the interferometric objective lens, however, is commonly present in CSI measurements, and reduces both the resolving power of the imaging system and the ability to measure tilted surfaces. This paper extends the linear theory of CSI to consider the effects of defocus on the 3D transfer function and the point spread function in an otherwise ideal CSI instrument. The results are compared with measurements of these functions in a real instrument. This work provides further evidence for the validity of the linear systems theory of CSI. Optical Society of America 2017-12-21 Article PeerReviewed Su, Rong, Thomas, Matthew, Leach, Richard and Coupland, Jeremy (2017) Effects of defocus on the transfer function of coherence scanning interferometry. Optics Letters, 43 (1). pp. 82-85. ISSN 1539-4794 https://www.osapublishing.org/ol/abstract.cfm?uri=ol-43-1-82 doi:10.1364/OL.43.000082 doi:10.1364/OL.43.000082 |
| spellingShingle | Su, Rong Thomas, Matthew Leach, Richard Coupland, Jeremy Effects of defocus on the transfer function of coherence scanning interferometry |
| title | Effects of defocus on the transfer function of coherence scanning interferometry |
| title_full | Effects of defocus on the transfer function of coherence scanning interferometry |
| title_fullStr | Effects of defocus on the transfer function of coherence scanning interferometry |
| title_full_unstemmed | Effects of defocus on the transfer function of coherence scanning interferometry |
| title_short | Effects of defocus on the transfer function of coherence scanning interferometry |
| title_sort | effects of defocus on the transfer function of coherence scanning interferometry |
| url | https://eprints.nottingham.ac.uk/48237/ https://eprints.nottingham.ac.uk/48237/ https://eprints.nottingham.ac.uk/48237/ |