Detecting the signature of motion stage non-linearity for focus variation microscopy using measurement noise and surface
topography repeatability

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Detecting the signature of motion stage non-linearity for focus variation microscopy using measurement noise and surface topography repeatability

Measurement noise is one of the ISO-proposed metrological characteristics of areal surface texture instruments [1, 2, 3, 4]. Measurement noise includes all of the unwanted contributions to the output signals when the instrument is used in its normal operating condition [5, 6]. This paper focuses on...

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Bibliographic Details
Main Authors:	Alburayt, Anas, Syam, Wahyudin P., Leach, Richard
Format:	Conference or Workshop Item
Published:	2017
Subjects:	Measurement noise surface topography repeatability stage non-linearity metrological characteristics
Online Access:	https://eprints.nottingham.ac.uk/44018/

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