Detecting the signature of motion stage non-linearity for focus variation microscopy using measurement noise and surface topography repeatability
Measurement noise is one of the ISO-proposed metrological characteristics of areal surface texture instruments [1, 2, 3, 4]. Measurement noise includes all of the unwanted contributions to the output signals when the instrument is used in its normal operating condition [5, 6]. This paper focuses on...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Published: |
2017
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| Subjects: | |
| Online Access: | https://eprints.nottingham.ac.uk/44018/ |