High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface

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High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface

Lateral optical distortion is present in most optical imaging systems. In coherence scanning interferometry, distortion may cause field-dependent systematic errors in the measurement of surface topography. These errors become critical when high-precision surfaces, e.g. precision optics, are measured...

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Bibliographic Details
Main Authors:	Ekberg, Peter, Su, Rong, Leach, Richard K.
Format:	Article
Published:	Optical Society of America 2017
Online Access:	https://eprints.nottingham.ac.uk/43725/

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