High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface
Lateral optical distortion is present in most optical imaging systems. In coherence scanning interferometry, distortion may cause field-dependent systematic errors in the measurement of surface topography. These errors become critical when high-precision surfaces, e.g. precision optics, are measured...
| Main Authors: | , , |
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| Format: | Article |
| Published: |
Optical Society of America
2017
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| Online Access: | https://eprints.nottingham.ac.uk/43725/ |