Optical difference engine for defect inspection in highly-parallel manufacturing processes

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Optical difference engine for defect inspection in highly-parallel manufacturing processes

Traditional defect inspection for highly-parallel manufacturing processes requires the processing of large measurement datasets, which is often not fast enough for in-situ inspection of large areas with high resolution. This study develops an all-optical difference engine for fast defect detection i...

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Bibliographic Details
Main Authors:	Feng, Xiaobing, Su, Rong, Liu, Mingyu, Leach, Richard K.
Format:	Conference or Workshop Item
Published:	2017
Online Access:	https://eprints.nottingham.ac.uk/42298/

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