Optical difference engine for defect inspection in highly-parallel manufacturing processes
Traditional defect inspection for highly-parallel manufacturing processes requires the processing of large measurement datasets, which is often not fast enough for in-situ inspection of large areas with high resolution. This study develops an all-optical difference engine for fast defect detection i...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2017
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| Online Access: | https://eprints.nottingham.ac.uk/42298/ |