Optical difference engine for defect inspection in highly-parallel manufacturing processes
Traditional defect inspection for highly-parallel manufacturing processes requires the processing of large measurement datasets, which is often not fast enough for in-situ inspection of large areas with high resolution. This study develops an all-optical difference engine for fast defect detection i...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2017
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| Online Access: | https://eprints.nottingham.ac.uk/42298/ |
| _version_ | 1848796456254701568 |
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| author | Feng, Xiaobing Su, Rong Liu, Mingyu Leach, Richard K. |
| author_facet | Feng, Xiaobing Su, Rong Liu, Mingyu Leach, Richard K. |
| author_sort | Feng, Xiaobing |
| building | Nottingham Research Data Repository |
| collection | Online Access |
| description | Traditional defect inspection for highly-parallel manufacturing processes requires the processing of large measurement datasets, which is often not fast enough for in-situ inspection of large areas with high resolution. This study develops an all-optical difference engine for fast defect detection in highly-parallel manufacturing processes, where the detection of defects (differences from nominal) is performed optically and in real-time. Identification of defects is achieved through an optical Fourier transform and spatial filtering, detecting differences between two real objects by nulling information that is repeated in each object. The developed prototype device is demonstrated using geometric patterns of similar scale to components in printed electronic circuits |
| first_indexed | 2025-11-14T19:48:16Z |
| format | Conference or Workshop Item |
| id | nottingham-42298 |
| institution | University of Nottingham Malaysia Campus |
| institution_category | Local University |
| last_indexed | 2025-11-14T19:48:16Z |
| publishDate | 2017 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | nottingham-422982020-05-04T18:37:42Z https://eprints.nottingham.ac.uk/42298/ Optical difference engine for defect inspection in highly-parallel manufacturing processes Feng, Xiaobing Su, Rong Liu, Mingyu Leach, Richard K. Traditional defect inspection for highly-parallel manufacturing processes requires the processing of large measurement datasets, which is often not fast enough for in-situ inspection of large areas with high resolution. This study develops an all-optical difference engine for fast defect detection in highly-parallel manufacturing processes, where the detection of defects (differences from nominal) is performed optically and in real-time. Identification of defects is achieved through an optical Fourier transform and spatial filtering, detecting differences between two real objects by nulling information that is repeated in each object. The developed prototype device is demonstrated using geometric patterns of similar scale to components in printed electronic circuits 2017-03-15 Conference or Workshop Item PeerReviewed Feng, Xiaobing, Su, Rong, Liu, Mingyu and Leach, Richard K. (2017) Optical difference engine for defect inspection in highly-parallel manufacturing processes. In: 12th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, (LAMDAMAP 2017), 15-16 March, 2017, Renishaw Innovation Centre, Wotton-under-Edge , United Kingdom. |
| spellingShingle | Feng, Xiaobing Su, Rong Liu, Mingyu Leach, Richard K. Optical difference engine for defect inspection in highly-parallel manufacturing processes |
| title | Optical difference engine for defect inspection in highly-parallel manufacturing processes |
| title_full | Optical difference engine for defect inspection in highly-parallel manufacturing processes |
| title_fullStr | Optical difference engine for defect inspection in highly-parallel manufacturing processes |
| title_full_unstemmed | Optical difference engine for defect inspection in highly-parallel manufacturing processes |
| title_short | Optical difference engine for defect inspection in highly-parallel manufacturing processes |
| title_sort | optical difference engine for defect inspection in highly-parallel manufacturing processes |
| url | https://eprints.nottingham.ac.uk/42298/ |