Laser ultrasound measurement of diaphragm thickness, Young’s modulus and Poisson’s ratio in a MEMS device

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Laser ultrasound measurement of diaphragm thickness, Young’s modulus and Poisson’s ratio in a MEMS device

Laser-generated Lamb waves, coupled with a large bandwidth Michelson interferometer, have been demonstrated to accurately measure the thickness of a MEMS pressure sensor diaphragm in the [110] direction of a silicon wafer. Using the reassigned Gabor time-frequency method to produce group velocity di...

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Bibliographic Details
Main Authors:	McKee, Campbell, Culshaw, Brian, Leach, Richard K.
Format:	Article
Published:	Institute of Electrical and Electronics Engineers 2016
Subjects:	Elastic modulus Elasticity Laser ultrasonics Microelectromechanical systems (MEMS) Poisson’s ratio Silicon Young’s modulus
Online Access:	https://eprints.nottingham.ac.uk/40685/

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