Laser ultrasound measurement of diaphragm thickness, Young’s modulus and Poisson’s ratio in a MEMS device
Laser-generated Lamb waves, coupled with a large bandwidth Michelson interferometer, have been demonstrated to accurately measure the thickness of a MEMS pressure sensor diaphragm in the [110] direction of a silicon wafer. Using the reassigned Gabor time-frequency method to produce group velocity di...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Published: |
Institute of Electrical and Electronics Engineers
2016
|
| Subjects: | |
| Online Access: | https://eprints.nottingham.ac.uk/40685/ |