Laser ultrasound measurement of diaphragm thickness, Young’s modulus and Poisson’s ratio in a MEMS device
Laser-generated Lamb waves, coupled with a large bandwidth Michelson interferometer, have been demonstrated to accurately measure the thickness of a MEMS pressure sensor diaphragm in the [110] direction of a silicon wafer. Using the reassigned Gabor time-frequency method to produce group velocity di...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Published: |
Institute of Electrical and Electronics Engineers
2016
|
| Subjects: | |
| Online Access: | https://eprints.nottingham.ac.uk/40685/ |
| _version_ | 1848796115466452992 |
|---|---|
| author | McKee, Campbell Culshaw, Brian Leach, Richard K. |
| author_facet | McKee, Campbell Culshaw, Brian Leach, Richard K. |
| author_sort | McKee, Campbell |
| building | Nottingham Research Data Repository |
| collection | Online Access |
| description | Laser-generated Lamb waves, coupled with a large bandwidth Michelson interferometer, have been demonstrated to accurately measure the thickness of a MEMS pressure sensor diaphragm in the [110] direction of a silicon wafer. Using the reassigned Gabor time-frequency method to produce group velocity dispersion curves, the technique facilitates the measurement of thickness, Young’s modulus and Poisson’s ratio from just one non-contact measurement. In this investigation, thickness was determined to be 35.01 μm ± 0.18 μm. For comparison, the thickness was measured using an independent optical technique; obtaining a value of 34.60 μm ± 0.27 μm. Values for Young’s modulus and Poisson’s ratio were also determined to be 163 GPa ± 11.7 GPa and 0.351 respectively and these are in good agreement with values found in the literature. |
| first_indexed | 2025-11-14T19:42:51Z |
| format | Article |
| id | nottingham-40685 |
| institution | University of Nottingham Malaysia Campus |
| institution_category | Local University |
| last_indexed | 2025-11-14T19:42:51Z |
| publishDate | 2016 |
| publisher | Institute of Electrical and Electronics Engineers |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | nottingham-406852020-05-04T18:27:45Z https://eprints.nottingham.ac.uk/40685/ Laser ultrasound measurement of diaphragm thickness, Young’s modulus and Poisson’s ratio in a MEMS device McKee, Campbell Culshaw, Brian Leach, Richard K. Laser-generated Lamb waves, coupled with a large bandwidth Michelson interferometer, have been demonstrated to accurately measure the thickness of a MEMS pressure sensor diaphragm in the [110] direction of a silicon wafer. Using the reassigned Gabor time-frequency method to produce group velocity dispersion curves, the technique facilitates the measurement of thickness, Young’s modulus and Poisson’s ratio from just one non-contact measurement. In this investigation, thickness was determined to be 35.01 μm ± 0.18 μm. For comparison, the thickness was measured using an independent optical technique; obtaining a value of 34.60 μm ± 0.27 μm. Values for Young’s modulus and Poisson’s ratio were also determined to be 163 GPa ± 11.7 GPa and 0.351 respectively and these are in good agreement with values found in the literature. Institute of Electrical and Electronics Engineers 2016-12-02 Article PeerReviewed McKee, Campbell, Culshaw, Brian and Leach, Richard K. (2016) Laser ultrasound measurement of diaphragm thickness, Young’s modulus and Poisson’s ratio in a MEMS device. IEEE Journal of Selected Topics in Quantum Electronics . ISSN 1558-4542 Elastic modulus Elasticity Laser ultrasonics Microelectromechanical systems (MEMS) Poisson’s ratio Silicon Young’s modulus http://dx.doi.org/10.1109/JSTQE.2016.2635518 doi:10.1109/JSTQE.2016.2635518 doi:10.1109/JSTQE.2016.2635518 |
| spellingShingle | Elastic modulus Elasticity Laser ultrasonics Microelectromechanical systems (MEMS) Poisson’s ratio Silicon Young’s modulus McKee, Campbell Culshaw, Brian Leach, Richard K. Laser ultrasound measurement of diaphragm thickness, Young’s modulus and Poisson’s ratio in a MEMS device |
| title | Laser ultrasound measurement of diaphragm thickness, Young’s modulus and Poisson’s ratio in a MEMS device |
| title_full | Laser ultrasound measurement of diaphragm thickness, Young’s modulus and Poisson’s ratio in a MEMS device |
| title_fullStr | Laser ultrasound measurement of diaphragm thickness, Young’s modulus and Poisson’s ratio in a MEMS device |
| title_full_unstemmed | Laser ultrasound measurement of diaphragm thickness, Young’s modulus and Poisson’s ratio in a MEMS device |
| title_short | Laser ultrasound measurement of diaphragm thickness, Young’s modulus and Poisson’s ratio in a MEMS device |
| title_sort | laser ultrasound measurement of diaphragm thickness, young’s modulus and poisson’s ratio in a mems device |
| topic | Elastic modulus Elasticity Laser ultrasonics Microelectromechanical systems (MEMS) Poisson’s ratio Silicon Young’s modulus |
| url | https://eprints.nottingham.ac.uk/40685/ https://eprints.nottingham.ac.uk/40685/ https://eprints.nottingham.ac.uk/40685/ |