Thermoelastic damping and support loss in MEMS ring resonators

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Thermoelastic damping and support loss in MEMS ring resonators

Micro Electro-Mechanical Systems (MEMS) rate sensors are inertial devices based on a resonating structure to measure and detect rate of angular rotation. For applications requiring high performance angular rate measurements it is important to be able to design MEMS rate sensors with high quality fac...

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Bibliographic Details
Main Author:	Hossain, Syed Tauseef
Format:	Thesis (University of Nottingham only)
Language:	English
Published:	2016
Subjects:	Resonators Microelectromechanical systems Damping (Mechanics)
Online Access:	https://eprints.nottingham.ac.uk/40539/

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