On tilt and curvature dependent errors and the calibration of coherence scanning interferometry

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On tilt and curvature dependent errors and the calibration of coherence scanning interferometry

Although coherence scanning interferometry (CSI) is capable of measuring surface topography with sub-nanometre precision, it is well known that the performance of measuring instruments depends strongly on the local tilt and curvature of the sample surface. Based on 3D linear systems theory, however,...

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Bibliographic Details
Main Authors:	Su, Rong, Wang, Yuhang, Coupland, Jeremy, Leach, Richard K.
Format:	Article
Published:	Optical Society of America 2017
Online Access:	https://eprints.nottingham.ac.uk/39959/

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