On tilt and curvature dependent errors and the calibration of coherence scanning interferometry
Although coherence scanning interferometry (CSI) is capable of measuring surface topography with sub-nanometre precision, it is well known that the performance of measuring instruments depends strongly on the local tilt and curvature of the sample surface. Based on 3D linear systems theory, however,...
| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Optical Society of America
2017
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| Online Access: | https://eprints.nottingham.ac.uk/39959/ |