Numerical modelling of chemical vapour deposition reactors

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Numerical modelling of chemical vapour deposition reactors

In this thesis we study the chemical reactions and transport phenomena which occur in a microwave power assisted chemical vapour deposition (MPA-CVD) reactor which facilitates diamond growth. First we introduce a model of an underlying binary gas flow and its chemistry for a hydrogen gas mixture. Th...

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Bibliographic Details
Main Author:	Sime, Nathan
Format:	Thesis (University of Nottingham only)
Language:	English
Published:	2016
Online Access:	https://eprints.nottingham.ac.uk/36227/

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