Numerical modelling of chemical vapour deposition reactors
In this thesis we study the chemical reactions and transport phenomena which occur in a microwave power assisted chemical vapour deposition (MPA-CVD) reactor which facilitates diamond growth. First we introduce a model of an underlying binary gas flow and its chemistry for a hydrogen gas mixture. Th...
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| Format: | Thesis (University of Nottingham only) |
| Language: | English |
| Published: |
2016
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| Online Access: | https://eprints.nottingham.ac.uk/36227/ |