Phase and fringe order determination in wavelength scanning interferometry
A method to obtain unambiguous surface height measurements using wavelength scanning interferometry with an improved repeatability, comparable to that obtainable using phase shifting interferometry, is reported. Rather than determining the conventional fringe frequency-derived z height directly, th...
| Main Authors: | , , , , |
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| Format: | Article |
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Optical Society of America
2016
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| Online Access: | https://eprints.nottingham.ac.uk/32803/ |
| _version_ | 1848794492889464832 |
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| author | Moschetti, Guiseppe Forbes, Alistair Leach, Richard K. Jiang, Xiang O'Connor, Daniel |
| author_facet | Moschetti, Guiseppe Forbes, Alistair Leach, Richard K. Jiang, Xiang O'Connor, Daniel |
| author_sort | Moschetti, Guiseppe |
| building | Nottingham Research Data Repository |
| collection | Online Access |
| description | A method to obtain unambiguous surface height measurements using wavelength scanning interferometry with an improved repeatability, comparable to that obtainable using phase shifting interferometry, is reported. Rather than determining the conventional fringe frequency-derived z height directly, the method uses the frequency to resolve the fringe order ambiguity, and combine this information with the more accurate and repeatable fringe phase derived z height. A theoretical model to evaluate the method’s performance in the presence of additive noise is derived and shown to be in good agreement with experiments. The measurement repeatability is improved by a factor of ten over that achieved when using frequency information alone, reaching the sub-nanometre range. Moreover, the z-axis non-linearity (bleed-through or ripple error) is reduced by a factor of ten. These order of magnitude improvements in measurement performance are demonstrated through a number of practical measurement examples. |
| first_indexed | 2025-11-14T19:17:04Z |
| format | Article |
| id | nottingham-32803 |
| institution | University of Nottingham Malaysia Campus |
| institution_category | Local University |
| last_indexed | 2025-11-14T19:17:04Z |
| publishDate | 2016 |
| publisher | Optical Society of America |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | nottingham-328032020-05-04T17:46:18Z https://eprints.nottingham.ac.uk/32803/ Phase and fringe order determination in wavelength scanning interferometry Moschetti, Guiseppe Forbes, Alistair Leach, Richard K. Jiang, Xiang O'Connor, Daniel A method to obtain unambiguous surface height measurements using wavelength scanning interferometry with an improved repeatability, comparable to that obtainable using phase shifting interferometry, is reported. Rather than determining the conventional fringe frequency-derived z height directly, the method uses the frequency to resolve the fringe order ambiguity, and combine this information with the more accurate and repeatable fringe phase derived z height. A theoretical model to evaluate the method’s performance in the presence of additive noise is derived and shown to be in good agreement with experiments. The measurement repeatability is improved by a factor of ten over that achieved when using frequency information alone, reaching the sub-nanometre range. Moreover, the z-axis non-linearity (bleed-through or ripple error) is reduced by a factor of ten. These order of magnitude improvements in measurement performance are demonstrated through a number of practical measurement examples. Optical Society of America 2016-04-16 Article PeerReviewed Moschetti, Guiseppe, Forbes, Alistair, Leach, Richard K., Jiang, Xiang and O'Connor, Daniel (2016) Phase and fringe order determination in wavelength scanning interferometry. Optics Express, 24 (8). pp. 8997-9012. ISSN 1094-4087 https://www.osapublishing.org/oe/abstract.cfm?uri=oe-24-8-8997 doi:10.1364/OE.24.008997 doi:10.1364/OE.24.008997 |
| spellingShingle | Moschetti, Guiseppe Forbes, Alistair Leach, Richard K. Jiang, Xiang O'Connor, Daniel Phase and fringe order determination in wavelength scanning interferometry |
| title | Phase and fringe order determination in wavelength scanning interferometry |
| title_full | Phase and fringe order determination in wavelength scanning interferometry |
| title_fullStr | Phase and fringe order determination in wavelength scanning interferometry |
| title_full_unstemmed | Phase and fringe order determination in wavelength scanning interferometry |
| title_short | Phase and fringe order determination in wavelength scanning interferometry |
| title_sort | phase and fringe order determination in wavelength scanning interferometry |
| url | https://eprints.nottingham.ac.uk/32803/ https://eprints.nottingham.ac.uk/32803/ https://eprints.nottingham.ac.uk/32803/ |