Phase and fringe order determination in wavelength scanning interferometry
A method to obtain unambiguous surface height measurements using wavelength scanning interferometry with an improved repeatability, comparable to that obtainable using phase shifting interferometry, is reported. Rather than determining the conventional fringe frequency-derived z height directly, th...
| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
Optical Society of America
2016
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| Online Access: | https://eprints.nottingham.ac.uk/32803/ |