Apparent beam size definition of focused ion beams based on scanning electron microscopy images of nanodots

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Apparent beam size definition of focused ion beams based on scanning electron microscopy images of nanodots

In this paper the new term apparent beam size of Focused Ion Beam (FIB) is introduced and an original method of its evaluation is demonstrated. Traditional methods of measuring the beam size, like the knife edge method, provide information about the quality of the beam itself but practically they do...

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Bibliographic Details
Main Authors:	Vladov, Nikola, Segal, Joel, Ratchev, Svetan
Format:	Article
Published:	AIP 2015
Subjects:	apparent beam size FIB resolution nanodots overlap
Online Access:	https://eprints.nottingham.ac.uk/29493/

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