Apparent beam size definition of focused ion beams based on scanning electron microscopy images of nanodots
In this paper the new term apparent beam size of Focused Ion Beam (FIB) is introduced and an original method of its evaluation is demonstrated. Traditional methods of measuring the beam size, like the knife edge method, provide information about the quality of the beam itself but practically they do...
| Main Authors: | , , |
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| Format: | Article |
| Published: |
AIP
2015
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| Subjects: | |
| Online Access: | https://eprints.nottingham.ac.uk/29493/ |