Maclean, J. O., Hodson, J. R., & Voisey, K. (2015). Laser drilling of via micro-holes in single-crystal semiconductor substrates using a 1070 nm fibre laser with millisecond pulse widths. SPIE.
Chicago Style (17th ed.) CitationMaclean, Jessica O., Jonathan R. Hodson, and K.T Voisey. Laser Drilling of via Micro-holes in Single-crystal Semiconductor Substrates Using a 1070 Nm Fibre Laser with Millisecond Pulse Widths. SPIE, 2015.
MLA (9th ed.) CitationMaclean, Jessica O., et al. Laser Drilling of via Micro-holes in Single-crystal Semiconductor Substrates Using a 1070 Nm Fibre Laser with Millisecond Pulse Widths. SPIE, 2015.
Warning: These citations may not always be 100% accurate.